This set CVD equipment is a miniaturized CVD system, the core of which is a mini tube furnace, which uses resistance wire heating, and the maximum temperature of the equipment can reach 1200℃. The instrument also contains a three-channel float flow meter and a molecular pump set, which respectively constitute the inlet and outlet gas parts of the CVD. There is a digital display vacuum gauge on the right side of the furnace tube to control the vacuum degree and atmosphere environment inside the furnace tube. The system adopts PID intelligent temperature control, and the temperature control accuracy can reach ±1℃.
The tube furnace adopts temperature control meter operation in operation, can preset the temperature control curve, one-button start and stop, easy to use, can simplify the experiment operation and save the experiment time. The high-vacuum molecular pump group can effectively increase the background vacuum and improve the quality of the reaction product.
High vacuum mini CVD tube furnace technical parameters:
1200℃ mini-tube furnace parameters |
Supply voltage | AC220V, 50Hz |
Maximum power | 2KW |
Heating zone | Single heating zone 200mm |
Constant temperature zone head | 100mm |
Heating element | Heat-resistant alloy wire |
Thermocouple | K type |
Operating temperature | ≤1150℃ |
Heating rate | Suggest ≤10℃/min |
Temperature control accuracy | ±1℃ |
Temperature control method | AI-PID 30-segment process curve, with overheat and thermocouple failure protection |
Furnace tube material | High purity quartz |
Furnace tube size | φ50mm O.D x 450mm L |
Vacuum pump | Mechanical pump pumping speed 1.1L/s |
Ultimate vacuum | 5Pa |
Three-channel float flowmeter parameters |
Valve type | Stainless steel needle valve |
Number of gas paths | Three |
Pressure range | 0.05~0.3MPa |
Range | 160 SCCM (Air) |
Mixing tank volume | 750mL |
Gas path material | 304 stainless steel |
Pipe interface | 6.35mm ferrule connector |
Molecular pump parameters |
Product number | CY-GZK103-A |
Molecular pump | Turbomolecular pump |
Backing pump | Two-stage rotary vane pump |
Pumping rate | Molecular pump: 6000L/S | Comprehensive pumping performance: 30 minutes vacuum can reach: 5×10E-3Pa |
Rotary vane pump: 1.1L/S |
Ultimate vacuum | 5×10E-4Pa |
Pumping port | KF40 |
Exhaust interface | KF16 |
Vacuum measurement | Compound vacuum gauge |
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