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1200℃ three heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIIT-3Z-LV

1200℃ three heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIIT-3Z-LV

    1200℃ three heating zone low vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ three heating zone low vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

1200℃ three heating zone low vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ three heating zone low vacuum CVD system technical parameters:

Vacuum tube   furnace



Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber   length


Heating zone   length


Operating   temperature


Temperature   control accuracy


Temperature   control mode

30 or 50 segment program temperature control

Display mode


Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V   50/60Hz

Gas supply   system



Gas channel


Measuring   unit

Gas mass flow meter

Measuring   range

A channel: 0100SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement  accuracy


Pipe pressure resistance


Working   pressure difference


Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Exhaust   system

Mechanical   pump

Rotary vane pump

Pumping rate


Exhaust   interface


Vacuum   measurement

Resistance gauge

Ultimate   vacuum


Power supply

AC:220V   50/60Hz

Pumping   interface


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