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1200℃ three heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIIT-3Z-LV

1200℃ three heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIIT-3Z-LV

    1200℃ three heating zone low vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ three heating zone low vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ three heating zone low vacuum CVD system technical parameters:

Vacuum tube   furnace

Model

CY-O1200-50IIIT

Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length

1000mm

Furnace chamber   length

660mm

Heating zone   length

200mm+200mm+200mm

Operating   temperature

0~1100℃

Temperature   control accuracy

±1℃

Temperature   control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" cutting sleeve joint, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V   50/60Hz

Gas supply   system

Model

CY-3Z

Gas channel

3-channel

Measuring   unit

Gas mass flow meter

Measuring   range

A channel: 0100SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement  accuracy

±1.0%F.S

Pipe pressure resistance

3MPa

Working   pressure difference

50300KPa

Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" cutting sleeve joint for gas inlet and outlet

Power supply

AC:220V   50/60Hz

Exhaust   system

Mechanical   pump

Rotary vane pump

Pumping rate

1.1L/S   

Exhaust   interface

KF16

Vacuum   measurement

Pirani gauge

Ultimate   vacuum

1.0E-1Pa

Power supply

AC:220V   50/60Hz

Pumping   interface

KF16

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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