The instrument is a plasma enhanced chemical vapor deposition device (PECVD) equipped with a roll-to-roll movement system. It is not only used in the continuous heat treatment process of wire rod, such as the preparation of carbon fiber, the modification of alloy and other materials wire rod, but also used for the continuous growth of graphene on the coil.
The equipment is composed of five parts: a roll-to-roll movement system, 1200℃2-heating-zone open tube furnace, PE plasma enhancement system, vacuum system and three-channel mass flowmeter gas mixer system. The whole machine can work in the vacuum / atmosphere protection environment.
The speed of the winding device can be adjusted from 1 to 400mm / min, and the mechanism adopts feedback adjustment, which can automatically correct the speed deviation and ensure the speed stability of the sample, thus ensuring the accuracy of the experiment.
Technical parameters of roll to roll PECVD tube furnace:
1200℃ Two-heating-zone tube furnace | Voltage | AC220V,50Hz |
Max power | 3KW |
Heating zone | Dual zones 200mm+200mm |
Working temperature | ≤1200℃ |
Temperature accuracy | ±1℃ |
Temperature control method | AI-PID 30-stage process curve, can store multiple |
Tube material | High purity quartz |
Tube size | φ80mm I.D x 1400mm L |
Sealing mode | Stainless steel vacuum flange |
Vacuum measurement | Resistance gauge |
Working gas | Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen |
Vacuum pump | Bipolar rotary vane vacuum pump |
Ultimate vacuum | 10^-1Pa |
Three-channel mass flowmeter | Valve type | Stainless steel needle valve |
Gas channels | Three-way |
Pressure range | 0.05~0.3MPa |
Range | 0~100 SCCM (Ar) 0~200 SCCM(H2) 0~500 SCCM(CH4) |
Flow control range | ±1.5% |
Mixing tank volume | 750mL |
Gas path material | 304 stainless steel |
Pipe interface | 6.35mm Bite type joint |
Power supply | AC220V 50Hz |
RF power | Output Power | 500W |
Output accuracy | ±1% |
RF frequency | 13.56MHz |
RF stability | ±0.005% |
Cooling method | Water cooling |
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