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1200℃ two heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIT-3Z-LV

1200℃ two heating zone low vacuum CVD system with 3-channel mass flow meter CY- O1200-50IIT-3Z-LV

    1200℃ two zone low vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ two zone low vacuum CVD system consists of a two-heating zone tube furnace, a three-channel float flow meter and a double stage rotary vane vacuum pump. The two heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form two temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections program of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

1200℃ two zone low vacuum CVD system with 3-channel mass flow meter application:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ two zone low vacuum CVD system with 3-channel mass flow meter technical parameters:

Vacuum tube furnace


CY- O1200-50IIT

Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber length


Heating zone length


Operating temperature


Temperature control   accuracy


Temperature control mode

30 or 50 segment program temperature control

Display mode


Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V 50/60Hz

Gas supply system



Gas channel


Measuring unit

Gas mass flow meter

Measuring range

A channel: 0100SCCM H2 gas

Remarks: If you need   other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement accuracy


Pipe pressure   resistance


Working pressure   difference


Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate


Exhaust interface


Vacuum measurement

Resistance gauge

Ultimate vacuum


Power supply

AC:220V 50/60Hz

Pumping interface


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