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Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System CY-3Z

Anti-Corrosion Three Channel Gas Mixing Control(MFC) Station for CVD System CY-3Z

    Feature

    1.Variety gas way for option

    2.304 stainless steel pipe core, corrosion resistance

    3.Stainless steel double card quick connector, easy to connect, and no leakage


Application

1.Semiconductor manufacturing industry

2.Vacuum coating equipment

3.Special material surface treatment

4.Gas combustion control

5.Leakage detection system

6.Environment detection and analysis equipment

7.Chemical, petrochemical, metallurgy, optical fiber and etc



Model no.

CY-3Z

Flow meter type

mass flow

Flow meter pipe core material

304 stainless steel

Valve type

electromagnetic regulating valve

Pipeline normal condition

close

Gas way

3 gas way

Connector size

1/4"

Measurement accuracy

±1.0%F.S

Linearity

±0.5%F.S

Repeat accuracy

±0.2%F.S

Pressure range

-0.1~0.15Mpa

A way range

0~100SCCM

B way range

0~200SCCM

C way range

0~500SCCM

flow control range

2%-100%

Zero temperature drift

0.6F.S(15-35℃)

Respond time

2S

Working temperature

15-50℃

Working power

AC 220V 50-60Hz


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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