Compact CVD Tube Furnace with 2"OD Quartz tube furnace and 3 gas mixer CY-O1200-50IS-3Z10V

Display

LED digital gauge

Limiting temperature

1200℃

Working temperature

≤1100℃

Heating rate

0-20℃/min

Heating Zone length

200mm, constant temperature zone:80mm

Quartz tube diameter

OD50*700mm

Temperature accuracy

± 1℃

Heating element

Fe-Cr-Al alloy adopt by Mo

Thermal couple

K TYPE

Cooling method

Double layer structure with fan cooling

Temperature control

30 steps programmable PID control

Chamber material

Alumina fiber

Vacuum pump

Mechanical rotary vacuum pump:10^-2Torr
Turbo pump with rotary vacuum pump:10^-5Torr

Cooling method

Air cooling

Connection pipe

stainless steel bellows, manual flap valve

Gas Mixer

3 way gas mixer

Working pressure：

-0.1MPa~0.15MPa

MFC1 Range

0~100SCCM

MFC2 Range

0~200SCCM

MFC3 Range

0~500SCCM

Working voltage

AC220V,50Hz