1.Regional refinding for semiconductor of germanium and silicon
3.Preparation of carbon nanotubes
4.Growth of graphene
5.Crystalline silicon substrate coating
6.Diffusion welding for metal materials
7.Heat treatment under the vacuum of atmosphere surroundings
1.Fast heating and cooling, maximum rate: 0-100°c/min
2.Multi-function: CVD experiment, growth of graphene, crystalline silicon substrate coating,etc.
3.LED display or LCD touch screen
4.Slide type, can manual sliding or electric sliding
5.Can connect with vacuum pump and atmosphere furnace.
High purity Al2O3 insulation chamber
Cooling fans are installed at the
Sliding flange assembly are made of stainless steel.
Imported alloy heating wire
PID automatic control via SCR power control
Stainless steel flange
800mm long sliding rail is installed with one
Mass Flow meters
Three precision mass flow meters (0.02% accuracy) with
MFC 1: Gas flow range from 0~100 sccm
MFC 2 : Control range from 0~200 sccm
MFC 3 : Control range from 0~200 sccm
Flowing rate accuracy: ±1% FS
Each gas channle has a SS needle valve for easy on/off
The flow rate is adjustable from the MFC panel
Vacuum pump and valve
Pumping rate: 8m3/h 50Hz; 9.6m3/h 60Hz.
KFD25 adapter and stainless steel pipe are connected
AC110-480V 50/60 Hz