The 1200℃ rapid annealing furnace is essentially a set of sliding tube furnace, which realizes the functions of heating and annealing. The intake end is equipped with a high-precision three-way mass flow meter to accurately control the atmosphere in the tube; at the same time, the equipment is equipped with a turbo molecular pump, which can quickly achieve a high vacuum environment and maximize the interference of the air atmosphere to the experiment.
The sliding furnace is composed of 1200℃standard single heating zone tube furnace and high precision slide rail. Tube furnace adopts resistance wire heating, combined with polycrystalline fiber furnace chamber, which has excellent temperature rise and thermal insulation performance. The slide rails are tightly matched, slide smoothly, and easy to operate. At the same time, it adopts full-color LCD touch screen operation, which is simple and intuitive, easy to use, can simplify the experimental operation and save the test time.
Technical Parameters of 1200℃ rapid annealing furnace:
| Item | Detail |
| 1200℃ Tube furnace | Voltage | AC220V,50Hz |
Max power | 4KW |
Heating zone | Single zone 440mm |
Working temperature | ≤1200℃ |
Temperature control accuracy | ±1℃ |
Temperature control method | AI-PID 30-stage process curve, can store multiple |
Tube material | High purity quartz |
Tube size | φ80mm I.D x 1000mm L |
Sealing mode | Stainless steel vacuum flange |
Vacuum measurement | Mechanical pressure gauge |
Working gas | Non-corrosive gases such as hydrogen, nitrogen, argon, and oxygen |
Three-way mass flowmeter | Valve type | Stainless steel needle valve |
Gas channels | Three-way |
Pressure range | 0.05~0.3MPa |
Range | 0~100 SCCM (H2) 0~200 SCCM（Ar） 0~500 SCCM（CH4） |
Flow control range | ±1.5% |
Mixing tank volume | 750mL |
Gas path material | 304 stainless steel |
Pipe interface | 6.35mm Bite type joint |
Power supply | AC220V 50Hz |
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