1700℃ hydrogen reduction CVD system can be used for vacuuming and filling atmosphere, so it is also called vacuum tube furnace and atmosphere tube furnace. The tube is made of a seamless high purity alumina and the maximum working temperature is up to 1650℃. In order to match the test requirements for the introduction of hydrogen, the tube furnace is equipped with a manual ignition device at the right end of the furnace tube to ensure the safety of the test; a vacuum gauge and an air pressure gauge are arranged on the left side of the furnace tube to control the vacuum and atmosphere inside the furnace tube. Further safety of the test is ensured by the interlocking of the solenoid valve and the pressure sensor and the flammable gas detection device.
This system also includes a two-channel float flow meter with a stainless steel needle valve and an air pressure gauge to accurately mix the gas that meets the test requirements. Under normal circumstances, this set of instruments is used with a double stage rotary vane vacuum pump to achieve a general low vacuum test environment. If you need a higher vacuum, you can contact our technicians to select a more powerful molecular pump.
1700℃ hydrogen reduction CVD system applications：
The device is widely used in materials or chemical laboratories to sinter various new material samples under hydrogen or hydrogen-nitrogen mixed gas conditions.
1700℃ hydrogen reduction CVD system technical parameters:
Vacuum tube furnace | Max power | 2.5kw |
Tube material | High purity alumina |
Tube diameter | 100mm |
Tube length | 1000mm |
Furnace chamber length | 440mm |
Heating zone length | 400mm |
Constant temperature zone | 200mm |
Operating temperature | 0～1650℃ |
Temperature control accuracy | ±1℃ |
Temperature control mode | 30 or 50 segment program temperature control |
Display mode | LCD |
Sealing method | 304 stainless steel vacuum flange |
Flange interface | 1/4" ferrule connector, KF16/25/40 joint |
Vacuum | 4.4E-3Pa |
Power supply | AC:220V 50/60Hz |
Ignition device | Manual ignition |
Gas supply system | Model | CY-2F |
Gas channel | 2-channel |
Measuring unit | Gas float flowmeter |
Measuring range | A channel: 0～100ml H2 gas | Remarks: If you need other ranges or gas types, you need to specify when ordering. |
B channel: 16～160ml N2 gas |
measurement accuracy | ±2.0% |
Pipe pressure resistance | 3MPa |
Working pressure difference | 50～300KPa |
Connecting pipe | 304 stainless steel |
Gas channel | 304 stainless steel needle valve |
Interface specification | 1/4" ferrule connector for gas inlet and outlet |
Exhaust system | Mechanical pump | Rotary vane pump |
Pumping rate | 1.1L/S |
Exhaust interface | KF16 |
Vacuum measurement | Resistance gauge |
Ultimate vacuum | 1.0E-1Pa |
Power supply | AC:220V 50/60Hz |
Pumping interface | KF16 |
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