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Laboraotry mini pecvd furnace with compact tube furnace,rf generator and gas mixer-CY-O1200-50IS-PECVD Laboraotry mini pecvd furnace with compact tube furnace,rf generator and gas mixer-CY-O1200-50IS-PECVD

Laboraotry mini pecvd furnace with compact tube furnace,rf generator and gas mixer-CY-O1200-50IS-PECVD

    CY-O1200-50IS-PECVD is a CE certified splittable single zone tube furnace with 60mm diameter quartz tube, mechanical vacuum pump and four channel gas flowing system and a 13.56MHz rf generator.It can achieve a maximum vacuum up to 10-2 torr and mix 1-4 types of gases for CVD or diffusion.It is widely used for laboratory thin film preparation

Model No.

CY-O1200-50IS-PECVD

RF frequency

13.56 MHz 0.005% stability

Reflection Power

200W max

Output Power

5 -300W adjustable with ±1% stability

RF Output Port

50 Ω, N-type, female

Matching

Automatic

Display

LED digital gauge

Limiting temperature

1200℃

Working temperature

≤1100℃

Heating rate

0-20℃/min

Heating Zone length

200mm, constant temperature zone:80mm

Quartz tube diameter

OD50*1000mm

Temperature accuracy

± 1℃

Heating element

Fe-Cr-Al alloy adopt by Mo

Thermal couple

K TYPE

Cooling method

Double layer structure with fan cooling

Temperature control

30 steps programmable PID control

Chamber material

Alumina fiber

Vacuum pump

Mechanical rotary vacuum pump:10-2Torr
Turbo pump with rotary vacuum pump:10-5Torr

Cooling method

Air cooling

Connection pipe

stainless steel bellows, manual flap valve

Gas Mixer

4 way gas mixer

Accuracy

±2%F.S.

Repeat accuracy

±0.2% FS

Linear precision

±1%F.S.

Working pressure:

-0.1MPa~0.15MPa

MFC1 Range

0~100SCCM

MFC2 Range

0~200SCCM

MFC3 Range

0~200SCCM

MFC4 Range

0~500SCCM

Working voltage

AC220V,50Hz

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    Tel:+82-31-999-4944
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