This product is a plasma-enhanced rotary chemical vapor deposition system (rotating PECVD). The furnace tube adopts a variable-diameter design. The middle tube diameter is relatively thick and there are mixing partitions, which can repeatedly mix powder or particles with the rotation of the furnace tube. The working tube can be rotated 360° uninterruptedly through the mechanical transmission control, so that the materials in the tube can be stirred and mixed to obtain a uniform heating effect; the equipment is also equipped with a plasma generator, which is connected to the furnace tube by inductive coupling, and the generated plasma can cover the furnace tube effectively, increase the activation energy of the reactants, reduce the reaction temperature, and improve the reaction efficiency. The equipment is equipped with a three-way mass flow meter and a gas mixing device, which can be used to pass a variety of gases into the pipe. At the same time, the equipment is equipped with a high-performance mechanical pump that can quickly evacuate the furnace pipe to vacuum; the cooperation of the pump and the gas circuit can achieve more CVD processes. The rotating device is very suitable for continuously coating and modifying powder materials by CVD method in an atmosphere protected environment.
Technical parameters of Rotary PECVD tube furnace:
Dual temperature zone tube furnace | Product model | CY-O1200-60IIC-R |
Equipment power | 3KW |
Furnace tube material | High purity quartz |
Furnace tube size | Φ60*420+Φ100*360+Φ60*420mm (Quartz heteromorphic tube) |
Furnace chamber length | 440mm |
Heating zone length | 200mm+200mm |
Operating temperature | 0～1150℃ |
Limit temperature | 1200℃ |
Temperature control accuracy | ±1℃ |
Thermocouple type | K-type thermocouple |
Temperature control mode | 30-segment program temperature control, PID parameter self-tuning |
Display mode | HD full color LCD touch screen |
Sealing method | 304 stainless steel vacuum flange |
Power supply | AC: 220V 50/60Hz |
Rotation speed | 0~13rpm |
Tilt angle | 0~35° |
3-channel mass flow meter | Product model | CY-3Z |
Number of gas paths | 3 channels |
Flowmeter type | Mass flowmeter |
Measuring range | A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm |
Measurement accuracy | ±1.5% |
Working pressure difference | 0.1~0.5MPa |
Pipeline interface | 1/4 inch ferrule connector |
Power supply | AC220V 50/60Hz |
Vacuum system | Vacuum pump | Dual stage rotary vane pump |
Pumping speed | 1.1L/s |
Pumping port | KF16 |
Pump ultimate vacuum | 10E-1Pa |
Power supply | AC220V 50/60Hz |
RF power supply | Signal frequency | 13.56MHz±0.005% |
Power output range | 0~500W |
Maximum reflected power | 100W |
RF output interface | 50Ω, N-Type, female |
Power stability | ≤5W |
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