Desktop Dual-Target Magnetron Sputtering Coating Instrument Introduction

Desktop Dual-Target Magnetron Sputtering Coating Instrument Introduction

This equipment is a dual-target magnetron sputtering coating system dedicated to the fabrication of metal thin films

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This equipment is a dual-target magnetron sputtering coating system dedicated to the fabrication of metal thin films. It is widely applied in electronics, optics, special ceramic synthesis, and SEM sample preparation for laboratory research.

The system adopts a high-vacuum stainless steel chamber equipped with a quartz viewing window with baffles to facilitate real-time observation and recording of experiments. Featuring outstanding vacuum performance and a compact footprint, it is perfectly suited for laboratory environments. A rotatable heating sample stage is integrated to significantly improve thin-film uniformity and coating quality. The whole machine adopts a modular design with intuitive operation logic and a user-friendly interface for easy operation.

Technical Parameters of Dual-Target Magnetron Sputtering Coating Instrument:

Product Name	Desktop Stainless Steel Chamber Dual-Target Magnetron Sputtering Coating Instrument
Product Model	CY-MSZ273-II-DC-SS
Sample Stage – Overall Dimension	φ100 mm
Sample Stage – Adjustable Rotation Speed	≤20 rpm
Magnetron Gun	Two 2-inch magnetron targets; Target dimension: Diameter 50.8 mm, Thickness ≤3 mm
Vacuum Chamber – Chamber Size	φ273 mm × 280 mm
Vacuum Chamber – Viewing Window	Front-mounted
Vacuum Chamber – Material	304 Stainless Steel
Vacuum Chamber – Opening Method	Top cover opening + front door opening
Vacuum System – Fore Pump	Low-noise two-stage rotary vane pump
Vacuum System – Turbo Molecular Pump	Low-noise high-pumping-speed turbo molecular pump (optional)
Vacuum System – Vacuum Gauge	Composite vacuum gauge
Vacuum System – Pumping Port	KF16
Vacuum System – Exhaust Port	KF16
Sputtering Working Vacuum	DC mode: 0.3 Pa; RF mode: 3 Pa
Power Supply Input	AC 220 V, 50/60 Hz
Fore Pump Pumping Speed	1.1 L/s
Power Configuration – Power Supply Quantity	1 set of DC power supply
Power Configuration – Output Power	DC power supply: 500 W
Miscellaneous Parameters – Input Voltage	AC 220 V, 50 Hz
Miscellaneous Parameters – Total Machine Power	2 kW
Miscellaneous Parameters – Overall Machine Dimension	440 mm × 600 mm × 775 mm