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Desktop dual-target magnetron sputtering coater machineDesktop dual-target magnetron sputtering coater machineDesktop dual-target magnetron sputtering coater machineDesktop dual-target magnetron sputtering coater machineDesktop dual-target magnetron sputtering coater machine

Desktop dual-target magnetron sputtering coater machine

    This equipment is a dual-target magnetron coater, which can be used for the preparation of metal films. It is used in the fields of electronics, optics, special ceramics, etc. It can also be used for laboratory SEM sample preparation

This equipment is a dual-target magnetron coater, which can be used for the preparation of metal films. It is used in the fields of electronics, optics, special ceramics, etc. It can also be used for laboratory SEM sample preparation. This set of configurations uses a high-vacuum stainless steel chamber, and the chamber is equipped with a quartz observation window with a baffle to facilitate experimental observation and recording; the chamber design has excellent vacuum performance and a compact shape, which is very suitable for laboratory use. At the same time, the equipment is equipped with a rotating heating sample table, which can effectively improve the uniformity of the film and the quality of the film. The whole machine adopts a modular design, with simple operating logic and an intuitive operating interface, which is easy to use.

Application field:

This equipment is a dual-target magnetron coater, which can be used for the preparation of metal films. It is used in the fields of electronics, optics, special ceramics, etc. It can also be used for laboratory SEM sample preparation

Technical parameters:

Product name

Desktop dual-target magnetron sputtering   coater machine

Product model

CY-MSZ254-II-DC-SS

Sample table

Dimensions

φ100mm

Adjustable speed

≦20rpm

Magnetron target gun

Equipped with two two-inch magnetron   targets, target size: diameter 50.8mm, thickness ≦3mm

Vacuum chamber

Cavity size

φ254mm X 300mm

Observation window

Front-mounted

Cavity material

304 stainless steel

Opening method

Opening cover and front door

Vacuum system

 

Pre-stage pump

Bipolar rotary vane pump

Molecular pump

High pumping speed turbomolecular pump

Vacuum measurement

Compound vacuum gauge, range: 10-5~105Pa

Exhaust interface

ISO63

Exhaust interface

KF16

System vacuum

1.0×10-4Pa

Power supply

AC 220V 50/60Hz

Exhaust rate

Pre-stage pump pumping speed 1.1L/s

Output power

DC power supply 500W

Other parameters

Power supply voltage

AC220V,50Hz

Total power

2kW

Total size

710*480*580


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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