Dual chamber pulse laser coater

Dual chamber pulse laser coater consists of vacuum chamber (main sputtering chamber, sample inlet chamber), sample transfer mechanism, sample frame, rotating target table, vacuum exhaust, vacuum measurement, electrical control, gas distribution, computer control and other parts.

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Dual chamber pulse laser coater is used for growing optical crystals, ferroelectrics, ferromagnets, superconductors and organic compound thin film materials, suitable for growing high melting point, multi-elements and complex layered superlattice thin film materials containing gas elements. It is widely used in the research and manufacture of thin film materials in colleges and universities.

Dual chamber pulse laser coater specifications:

Main vacuum system		Sphere structure, size: dia. 450mm
Loading sample system		Vertical cylindrical stucture, size: dia. 150×150mm
Vacuum system configuration	Main vacuum chamber	Mechanical pump, molecular pump, valve
Vacuum system configuration	Loading sample system	Mechanical pump and molecular pump(sharing with primary chamber), valve
Ultimate pressure	Main vacuum system	≤6*10-6Pa(after baking and degassing)
Ultimate pressure	Loading sample system	≤6*10-3 Pa(after baking and degassing)
Vacuum recovery system	Main vacuum system	It can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Vacuum recovery system	Loading sample system	It can reach 5x10-3Pa in 20 minutes (the system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Rotating target platform		The maximum size of the target is about 60mm. Four target materials can be installed at one time, target changing in revolution motion; each target can rotate independently, rotation speed: 5-60 rpm
Substrate heating platform	Sample size	Dia. 51
	Mode of motion	Substrate rotates continuously, rotation speed:5-60 rpm
	Heating temperature	Maximum temperature of substrate heating: 800℃±1℃, Controlled and adjustable
Gas circuit system		1-circuit mass flow controller, 1-circuit inflation valve
Optional accessories	Laser device	Compatible with coherent 201 laser
	Laser beam scanning device	2D scanning mechanical platform, perform two degree of freedom scanning.
	Computer control system	The contents of control include common conversion target, target rotation, sample rotation, sample temperature control, laser beam scanning, etc.
Floor Space	Main unit	1800 * 1800mm²
Floor Space	Electric cabinet	700 *700mm²(one)

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