| Feature | Specially Designed for coating conductive gold film for SEM sample.Compact plasma sputtering coater designed for metallic coatings, such as gold, platinum, and silver.One 2" gold (4N) target is included. |
| Input Voltage | 220 VAC 50/60Hz, 200W< 1000 W (including vacuum pump power) |
| Output Voltage | 500 VDC |
| Sputtering current | 0 - 50 mA (max.) adjustable sputtering currentDigital current meter (mA)Over-current protection |
| Sputtering time | 1 -120 seconds adjustable |
| Specimen Chamber | Quartz glass tube, 165 mm OD. x 152 mm ID x 145 mm |
Specimen Stage
| 2" diameterheight adjustable, 30 - 80 mm from the sample to the target |
| Sputtering Head | 2" magnetron sputtering head.One manually operated shutter for target protection. |
| Vacuum Pressure | Digital vacuum pressure meter (Pa)KF25 vacuum pump connectorUltimate vacuum pressure 1 Pa by the mechanical pump. The Pump is not included. |
| Vacuum pump (optional) | The double stage rotary vane pump is recommended. Optional: you may use a turbo pump to achieve 1.0E-5 Torr vacuum by a turbo pump |
| Input gas | One 1/4 Swagelok type tube fitting is installed for connecting the inert gas cylinder.One metering valve is in the front panel for adjusting the input gas. |
| Target | One 50mm Dia. x 0.12mm gold target is included. 4N purity gold foil: 50 mm(2 inch) Dia. x 0.12 mm
Optional Targets are available
Au target (50 mm Dia. x 0.12 mm, 4N purity)
Pt target (50 mm Dia. x 0.12 mm, 4N purity)
Ag target (50 mm Dia. x 0.5 mm, 4N purity)
This model is suitable for coating Gold, Sliver, Platinium. And it is not suitable for coating light metallic material such as Al, Mg, Zn, or Carbon target due to low energy
|
| Product Dimension and weight | L 460 mm × W 330 mm × H 520 mm20kg |
| Warranty | One year limited with lifetime support |
