Electron beam evaporation coating system is mainly composed of evaporation vacuum chamber, e-type electron gun, thermal evaporation electrode, rotary substrate heating platform, working air path, exhaust system, vacuum measurement, electronic control system and installation machine platform.
Electron beam evaporation coating system is used for preparing conductive film, semiconductor film, ferroelectric film, optical film, etc. It is widely used in colleges and universities, scientific research institutions and small batch production.
U-box front opening vacuum chamber, rear-mounted pumping system
Vacuum system configuration
Compound molecular pump, mechanical pump, gate valve
≤6. 67×10-5Pa (after baking and degassing)
Vacuum recovery system
It can reach 6.67×10-4pa in 45 minutes (after the system is exposed to the atmosphere for a short time and is filled with dry nitrogen)
Electron beam evaporation source
E type electron gun
Anode voltage: 6kv、8kv;
Water-cooled crucible, four point design, each capacity of 11ml
0~6 KW adjustable
Resistance evaporation source (optional)
Current 300A，the maximum output 3kw
One set, Switchable
Water cooling electrode
Three roots, make up two evaporation boats
Type and size of workpiece frame
Substrate size: compatible with 4″substrate
Max substrate heating temperature 800℃±1℃
Substrate rotates continuously, rotation speed:5-60 rpm
The distance between the substrate and the evaporation source is adjustable from 300 to 350mm
Manually controlled sample baffle assembly: 1 set
Gas circuit system
1-circuit 200SCCM mass flow controller
Quartz crystal oscillation film thickness controller
Thickness monitoring range: 0~99u9999A;
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.