The instrument is a three-target magnetron coating machine with three two-inch magnetron target heads. The tilt angle of the target head and the distance from the sample stage are adjustable.
The instrument is a three-target magnetron coating machine with three two-inch magnetron target heads. The tilt angle of the target head and the distance from the sample stage are adjustable. In order to facilitate the experimental operation, the coating machine is also equipped with an electric baffle, which can directly control the opening and closing of the baffle through the display screen. The coating machine is equipped with a 100W RF power supply. By manually switching the output lines, three target heads can share one power supply (not simultaneous), thereby enabling operation of plating multiple or multiple layers of membranes in a single experiment.
The device is compact and well designed and can be placed on the desktop, making it ideal for lab purchases.
This set of configuration does not contain a vacuum system, customers can choose the high vacuum system that meets the requirements according to your own needs.
Three-target RF magnetron sputtering coating machine
RF power supply
0~100W continuously adjustable
O.D.φ300mm x 300mm
Magnetron sputtering head
Magnetron target parameter
Adjustable tilt angle 0~25°
The distance from the target to the sample stage is 50~80mm
Each target head is equipped with an electric baffle
Cooling method is water-cooled, need to be equipped with 10L/min water chiller
Sample stage parameters
Speed: 1~10rpm adjustable
Heating up to 500°C
Temperature control accuracy: ±1°C
On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.