Programmable single chamber magnetron sputtering coater is widely used in semiconductor, LED, photovoltaic and other industries. It is mainly used for the preparation of various metal, semiconductor and dielectric materials thin film, and can meet the needs of scientific research and small batch production.
Programmable single chamber magnetron sputtering coater is a single-chamber structure, mainly composed of sputtering vacuum chamber, magnetron sputtering target, ion bombardment, revolution substrate, optical heating system, sputtering power supply, working gas path, vacuum acquisition system, installation machine, vacuum measurement, water cooling, alarm system and control system,etc.
The system is controlled by IPC and PLC, with two modes of automatic and manual control. In addition to put the sample, all other processes are realized on the touch screen. It provides man-machine operation interface such as vacuum system, sputtering process setting, filling and venting system, etc. On the IPC, you can set parameters through the formula, to implement the procedure process and equipment parameter Settings.
Sputtering chamber vacuum limit
Vacuum recovery time
The system was pumped from atmosphere to 1.0×10-3 Pa within 15minutes
Film thickness nonuniformity≤±5%; nonuniformity between the slices≤±5%; Inhomogeneity between batches≤±5%
Sputtering vacuum chamber
The cylindrical structure, size 800mmx250mm
Magnetron sputtering system
Permanent magnet target 4, target size 6 inches;
One imported power supply (rf or dc pulse optional)；
Sputtering rate: 0.5 ~ 5 angstrom per second (target Al)
Revolution base plate
6 inches 6 pieces (4 inches 12 pieces or 3 inches 16 pieces);
The substrate revolution is 3~15 revolution/min, continuously adjustable, and the common rotation composite worktable is optional
Light heating system
Sample heating temperature: room temperature to 250 ℃, continuous adjustable;
Substrate temperature nonuniformity: ≤±10℃;
Temperature control method is PID automatic temperature control and digital display, equipped with imported temperature control meter.
Working gas channel
2 channel mass flow controller (MFC)
Gas pump composition
Cryopump (imported), Roots dry pump set, air gate valve (imported), pipes
System vacuum, working vacuum and backing vacuum was precisely measured by 2 vacuum gauges (imported); the vacuum degree can be displayed visually on the touch screen of industrial computer; the vacuum degree of the sputtering coating process can be monitored accurately.
The entire system can be controlled by IPC (touch screen) and PLC (imported)
electric control cabinet
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.