Vacuum magnetron sputtering system is mainly composed of sputtering vacuum chamber, permanent magnet magnetron sputtering target (three targets), single substrate heating platform, dc power supply, radio frequency power supply, working air path, air extraction system, vacuum measurement, electronic control system and installation platform.
Vacuum magnetron sputtering system is used for the preparation of novel thin film materials such as nanometer single-layer and multi-layer functional film, hard film, metal film, semiconductor film and dielectric film. It can be widely used in the research and production of thin film materials in colleges and universities.
Cylindrical front opening structure, size dia. 450×400mm
Vacuum system configuraition
Compound molecular pump, mechanical pump, pneumatic gate valve, imported SMC cylinder throttle valve
≤6.6*10-6 Pa(after baking and degassing)
Vacuum recovery system
It can reach 6.6x10-4pa in 25 minutes(start pumping after short exposure to air and filled with dry helium)
Magnetron target unit
Three sets of permanent magnetic target; target size dia. 60mm (one of those can be used for sputtering ferromagnetism materials); Each target rf sputtering is compatible with dc sputtering.Water cooling within the target; The sample centers of the three targets can fold upward together. The distance between target and sample is adjustable from 90 to 130mm. Each target is equipped with imported SMC rotary pneumatic baffle
Single substrate heating table
dia. 4 inches
Mode of motion
Substrate rotates continuously, rotation speed 0-30 rpm
Heated by imported heating wire, max heating temperature 600℃±1℃
Imported SMC angle air cylinder control
Gas circuit system
2-circuit mass flow controller
Computer control system
Fully automated control by PLC+IPC+touch screen
Film thickness gauge, air pump, cooling water circulator
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.