RF plasma magnetron sputtering coater is a compact 2" single head RF Plasma magnetron sputtering system coating non-metallic, mainly oxide thin film. It integrates all components into one-floor stand cabinet, including RF power source, quartz vacuum chamber, vacuum pump, recirculation water chiller and film thickness monitor etc.
RF plasma magnetron sputtering coater is an excellent and cost effective coater for coating thin film of non-conductive material in RF plasma magnetron sputtering coater is small in size, occupies less laboratory space, simple in operation and widely used. Therefore, it is widely used in the laboratories of major universities and research institutes.
One 13.5 MHz, 300 W RF Generator with automatic matching function is built in cabinet and connected to 2" sputtering head
Magnetron Sputtering Head
Vacuum Pump Station
650 mm L x 650 mm W x 1630 mm H
Warranty & Compliance
One years limited warranty with lifetime support