Furnace
Construction | Double layer steel casing with air cooling
High purity alumina fiber insulation for max. energy saving
Splitable cover for easy tube replacement |
Power
Consumption | 5 KW |
| Input Voltage | AC 208-240V Single Phase, 50 or 60 Hz |
Maximum
Temperature | 1200℃ |
Continuous
Temperature | 1100℃ |
Maximum
Heating Rate | <= 20℃ /min |
Heating Zone
Length | Three zones: (880mm, 35" in total)
Zone 1: 220mm (8.6" )
Zone 2: 440mm (17.3")
Zone 3: 220 mm (8.6") |
Constant
Temperature
Zone | If three zones are set at the same temperature, constant temperature zone
is 25"
(625 mm) long with a temperature discrepancy of +/- 1℃.
If using only one zone (center zone), constant temperature zone is 4.3"
(110 mm)
long with a temperature discrepancy of +/- 1℃. |
Temperature
Accuracy | +/- 1℃ |
Heating
Elements | Fe-Cr-Al Alloy doped by Mo |
Temperature
Controller | Three precision temperature controllers to control three zones separately.
PID automatic control with 30 programmable segments for precise control
of heating rate, cooling rate and dwell time.
Built in overheating & broken thermocouple protection.
Over temperature protection and alarm allows for operation without
attendant(s).
+/- 1 C temperature accuracy.
RS485 Communications Port.. |
Quartz Tube&
Sealing Flanges | 80 mm O.D x 72 mm ID. x 1400 mm fused quartz tube included.
Vacuum flanges with valves and pressure gauge are included.
Thermal block must be placed inside tube as the drawing below |
Vacuum Sealing
Flanges | Two stainless steel flanges with both vacuum gauge and valves included.
Min. vacuum pressure achieved by mechanical pump is 5.5 m-torr.
( 5.5x10^-3 torr).
The pressure can reach 10^-5 torr by using mechanical + molecular pump.
Leaking rate is < 5 m-torr / min. and stable vacuum pressure after 24 hours
is < 2 torr. |
| Oxygen Monitoring | An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used
in CVD systems
for preventing or reducing oxidation. Please click the picture below to
learn more: |
| Vacuum Pump | 120 L/m Rotary Vane Vacuum Pump is included with max. vacuum pressure
of 10^-2torr. Stainless steel hose tube is included for connecting to tube
furnace. |
Gas Flow Meter
and
Pressure Meter
| Three gas flow-meters (4% accuracy FS) are installed inside the mobile case
to
enable monitoring of gas flowing rates
Compact direct read flow meter, 10-100 cc/min.
Compact direct read flow meter, 16-160 cc/min.
Compact direct read flow meter, 25-250 cc/min. |
| Valves | Four stainless steel valves are installed in the side panel of mobile cart to
control mixing of three inlet gases separately |
| Dimensions | Furnace: 1100 X 450 x 670 mm
Bottom Mobile case: 600x600x597 mm |
