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Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

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    Basic Info

    • Model NO.: CY-RF

    • Structure: Desktop

    • Certification: CE, TUV

    • Type: Reaction Type

    • Cooling: Air

    • RF Frequency: 13.56MHz

    • Trademark: CY

    • Specification: 500W

    • HS Code: 85141090

    • Customized: Customized

    • Material: Alloy

    • Application: School

    • Matching: Automatic

    • Output Type: N Type

    • Warranty: One Year

    • Transport Package: Wooden Box

    • Origin: Zhengzhou, China


    Product Description

    RF generator used in PECVD system
    Introduction
    13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
    Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

    SPECIFICATIONS
     

    Noise<50 dB
    Output Power5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)      
    RF frequency13.56 MHz ±0.005% stability
    Reflection Power200W max.
    MatchingAutomatic
    RF Output Port50 Ω, N-type, female
    CoolingAir cooling
    Power208-240VAC, 50/60Hz
    Tube Size50 - 130 mm ( 2''- 5'' OD)  ( larger diameter coil up to 11" diameter is available upon request )
    ApplicationCombine with  tube furnace to get PECVD system
    other detailscan be desigbed as your requirement

    Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

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    • E-mail: cysi@cysi.wang
    • Tel: +86 371 5519 9322
    • Fax: +86 371 8603 6875
    • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China




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