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Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator

Basic Info


  • Model NO.: CY-RF

  • Structure: Desktop

  • Certification: CE, TUV

  • Type: Reaction Type

  • Cooling: Air

  • RF Frequency: 13.56MHz

  • Trademark: CY

  • Specification: 500W

  • HS Code: 85141090

  • Customized: Customized

  • Material: Alloy

  • Application: School

  • Matching: Automatic

  • Output Type: N Type

  • Warranty: One Year

  • Transport Package: Wooden Box

  • Origin: Zhengzhou, China


Product Description


RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.

SPECIFICATIONS

 

Noise<50 dB
Output Power5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)      
RF frequency13.56 MHz ±0.005% stability
Reflection Power200W max.
MatchingAutomatic
RF Output Port50 Ω, N-type, female
CoolingAir cooling
Power208-240VAC, 50/60Hz
Tube Size50 - 130 mm ( 2''- 5'' OD)  ( larger diameter coil up to 11" diameter is available upon request )
ApplicationCombine with  tube furnace to get PECVD system
other detailscan be desigbed as your requirement

Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF GeneratorLaboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
Factory

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us. 


Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator
Exhibition

Laboratory Portable 13.56MHz 300W/500W Auto-Match Plasma Digital RF Generator


Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Korea Distributor:
    NEO LFN Corp
    Email:info@neolfn.com
    Tel:+82-31-999-4944
    Contact:Haeseop Kim
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