This equipment is customized plasma testing equipment for customers. The main component of the equipment is an inductively coupled plasma generator. The generator can generate plasma in the quartz tube inside the inductance coil. The flanges on both sides of the quartz tube are equipped with observation windows. Users can observe experimental phenomena on the observation window or use other The instrument measures relevant parameters. The device is controlled by a touch screen, and the screen integrates all experimental functions, such as vacuum extraction, flow control, and RF power adjustment. At the same time, the inductance coil adopts water cooling design, and the outer casing has a cooling fan to ensure the stability of the whole equipment for a long time. This equipment is an indispensable instrument for the research of plasma-related properties in college laboratories.
Technical parameters of plasma testing equipment:
Item | Details |
Supply voltage | AC220V, 50Hz |
Maximum power | 1KW |
Coupling method | Inductive coupling |
Quartz chamber | O.Dφ30mm x 150mm wall thickness 3.5mm |
Observation window size | φ30mm |
Vacuum interface | KF16 |
Air inlet interface | 6.35mm ferrule connector |
Mass flowmeter | Ar calibration range 100sccm |
Vacuum pump | Bipolar rotary vane vacuum pump |
Ultimate vacuum | 0.1Pa |
Cooling method | Water-cooled copper tube + air-cooled shell |
RF power supply | Maximum output power 300W Automatic matching |
Overall size | 560mm x 620mm x 620mm |
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