High power program-controlled servo spin coater is a small, flexible and economical spin coating equipment that can achieve stability and uniformity that can be achieved on millions of dollars worth of equipment. It can maximum process 12 inch wafers Substrate.
High power program-controlled servo spin coater adopts the stainless steel casing,which is more durable and beautiful than plastic or lacquered metal; use industrial grade 400 watt servo motor system. The leading product in the same class reaches a maximum of 50,000 rpm/s. Rotational acceleration ensures stability and high repeatability of the rotating glue.
Spin coating program: store up to 100 groups of programs, each group has 100 steps, each step can be accurate to 0.1 seconds
Rotation speed: 0-5,000 rpm (higher speed optional), considering the safety of heavy or large spin coating,it is limited to 5000 rpm
Spin coating acceleration: 0-10,000 rpm / sec (higher optional), considering the safety of heavy or large spin coating, it is limited to 10000 rpm / s
Motor spin coating speed stability error: < ±1rpm
Speed adjustment accuracy and repeatability: 1rpm
Process time setting: 0-3,000 sec/step, time setting accuracy: 0.1sec
Support wafer size 25px-300mm (12" round crystal)
Spin coating uniformity: < ±3% in the range of 6 inches (need to remove edge 3 mm area to measure)
1.The latest in-house compact design reduces the size of the device.
2.7" touch screen control panel operating system, more convenient to operate.
3.Using industrial grade servo motors, the motor design avoids the photoresist and other contaminants into the motor.
4.The body is made of acid and alkali resistant, impact resistant and corrosion resistant stainless steel. It will never rust and is easy to clean.
5.The exhaust and pumping system is located at the bottom of the stage (to facilitate exhaust efficiency and spin coating uniformity).
6.The transparent, chemically resistant sealing cap completely isolates the spillage of the photoresist and effectively isolates the emission of toxic odors during the spin coating operation.
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