Fully Automatic Heating Spin Coater
Fully Automatic Heating Spin Coater Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films, mainly used in photoresist spin coating, biological medium production, sol-gel method for polymer film production, etc
CY-SPC8-SS spin coater is with vacuum chuck designed for easy and quick coating via sol-gel for wafers up to 8" diameter. This spin coater adopts advanced precision motor, the maximum speed can reach 5000rpm, which effectively guarantees the uniformity of film formation. Besides, the instrument adopts touch screen control, can preset the coating curve, which greatly simplifies the process.
Spin coater application:
Fully Automatic Heating Spin Coater Liquid or colloidal materials can be coated on silicon wafers, crystals, quartz, ceramics and other substrates to form thin films, mainly used in photoresist spin coating, biological medium production, sol-gel method for polymer film production, etc.
Technical parameters
Product Name | Fully Automatic Heating Spin Coater |
Model | CY-SPC8-SS |
Power supply | AC220V 50Hz |
Wafer specifications | Max. 8inch standard wafer |
Chamber | Chamber capacity: 5L Stainless steel material |
Spinning | Spinning speed: 0~5000rpm Acceleration: 100~5000rpm/s Speed resolution: 1rpm Program: can store 30 curves, each curve has 100 steps |
Automatic dispensing | Dispensing arm Pipelines: three lines and spray nozzles Compatible with viscous liquid (1000-1500 cps) |
Manual dispensing | Lid can be opened for manual dispensing |
Edge bead removal | Pipeline: one line Flow range: 5~50ml/min Liquid flow monitoring: float flowmeter, with flow alarm Edge removal range: 1~5mm±0.3mm |
Back side washing | Pipeline: one line Flow range: 20~200ml/min Liquid flow monitoring: float flowmeter, with flow alarm |
Heating | Heating method: infrared heating Heating temperature: ≤150℃ Temperature control method: AIP intelligent temperature control |
Chuck | Wafer fixation method: vacuum suction chuck, for 8inch wafer Chuck material: aluminium alloy |
Vacuum pump | Oil-less pump |
Operation method | Touch screen |
