The swing‑arm spin coater is a precision coating device based on the centrifugal‑force principle. By programmatically controlling the rotation speed, acceleration and duration of substrates, it enables liquid materials (e.g. photoresist, PDMS glue) to be evenly distributed on substrate surfaces to form high‑quality thin films or coatings. Its core design integrates automatic control, safety protection and high‑precision sensor technologies. It is widely used in semiconductor manufacturing, optical coating, micro‑electro‑mechanical systems (MEMS) and materials‑science research.
I. Core Functional Features
1. Precision Control Performance
Equipped with a closed‑loop servo motor and digital speed‑increase feedback system to guarantee stable rotation speed (100–5000 rpm) and precise acceleration/deceleration control, ensuring thin‑film thickness uniformity.
Multi‑segment programmable operation is supported (e.g. 5‑segment program sets, 10 spin‑coating gradient stages). Rotation speed, duration and acceleration parameters can be customized to satisfy complex‑process requirements.
2. Automation & Safety
Fitted with a 5‑inch full‑color touch screen for intelligent programming and real‑time monitoring, enabling one‑touch operation and parameter logging.
Electromagnetic safety switches, self‑locking top cover and double‑sealing design are integrated to prevent wafer flying‑out accidents and chemical contamination for operator safety.
3. Multi‑function Compatibility
The vacuum adsorption system is compatible with multiple substrate sizes (8‑12 inches). Vacuum‑powered substrate fixing avoids coating offset.
Optional ultrasonic heating or inert‑gas‑protection functions are available for photoresist pre‑baking or coating processes for sensitive materials.
II. Main Application Fields
1. Semiconductor Manufacturing
Applied in photoresist coating, SU‑8 mold fabrication and other processes to ensure coating uniformity and thickness consistency on wafer surfaces.
Microfluidics & MEMS Technology
Uniformly coats polymer glue solutions during PDMS chip fabrication to meet precision requirements for microfluidic channels or sensor structures.
2. Optics & Materials Science
Fabricates optical thin films (e.g. anti‑reflection coatings), nanomaterial coatings, and performs surface functionalization of biomaterials.
3. Scientific Research & Education
Suitable for thin‑film process research in universities and laboratories, supporting repeatable experiments and teaching demonstrations.
Product Features
1. Driven by professional‑grade servo motors for high precision and high repeatability.
2. User‑friendly design with ARM control and Android full‑color touch‑screen operation.
3. Stainless‑steel inner chamber and anodized panels for good appearance and easy cleaning.
4. Continuous and automatic glue feeding available for industrial‑scale applications.
5. Splash‑proof cover‑type cleaning and developing functions are optional upon customization.
6. Capable of processing extra‑large or heavy substrates; maximum substrate size: 12‑inch round substrate.
7. Customization is available for larger‑size / heavy‑duty substrates, inner‑chamber vacuum pumping and other special requirements.
Technical Specifications：
| Model | CY‑SPC12‑PTFE |
| Power Supply | AC220V, 50 Hz |
| Applicable Substrates | 8‑inch,12‑inch; aluminum‑alloy vacuum chuck |
| Chamber Material | PTFE |
| Rotation Speed | 0‑5000 rpm |
| Speed Resolution | ±1 rpm |
| Acceleration Range | 100‑2500 rpm/s |
| Max Single‑step Time | 3000 s |
| Time Resolution | 1 s |
| Programming | 100 programs ×100 steps |
| Dispensing Port | Expandable four‑channel automatic dispensing ports |
| Dispensing Function | Multi‑channel automatic dispensing upgradable |
| Glue‑dispensing Mode | Automatic |
| Operation | Full‑color LCD touch‑screen system |
| Overall Dimension | 650 mm × 680 mm × 620 mm |
| Net Weight | 35 KG |
Frequently Asked Questions：
Q1: What substrates can the CY‑SPC12‑PTFE spin coater handle?
A: It supports 8‑inch and 12‑inch round substrates. Custom solutions are available for extra‑large or heavy‑weight substrates.
Q2: Can I store multiple spin‑coating process recipes?
A: Yes. The unit stores up to 100 programs with 100 steps per program, ideal for switching between different material‑coating workflows.
Q3: Is this spin coater resistant to photoresist and organic solvents?
A: The chamber is made of PTFE (polytetrafluoroethylene), delivering good corrosion resistance to most photoresists and common organic solvents.
Q4: Can automatic glue‑dispensing be upgraded later?
A: Yes. Four‑channel dispensing ports can be expanded, and multi‑channel automatic‑dispensing function is upgradable as an option.
Q5: What customization options are available?
A: Available customizations: larger‑size chucks, heavy‑substrate reinforcement, inner‑chamber vacuum pumping, splash‑shield cleaning & developing function, ultrasonic heating and inert‑gas‑protection assembly.
Q6: Is the machine suitable for industrial production or only lab‑use?
A: It serves both R&D laboratories and small‑batch industrial production with continuous automatic glue‑feeding capability.
