The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.
Plasma cleaner is a new high-tech technology that uses plasma to achieve effects that cannot be achieved by conventional cleaning methods. Plasma is a state of matter, also called the fourth state of matter, and it is not the common three states of solid, liquid and gas. Apply enough energy to the gas to ionize and become a plasma state. The "active" components of plasma include: ions, electrons, atoms, active groups, excited nuclides (metastable states), photons, etc. The plasma cleaner uses the properties of these active components to treat the surface of the sample, so as to achieve the purpose of cleaning, coating, etc.
The chamber has a large usable area, uniform glowing, and can clean 6-inch silicon wafers.
RF power supply
Power supply features
The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
Long time normal operation
Simple and flexible operation
High power supply efficiency and low heat generation
With perfect reflection power protection function
0~300W continuously adjustable
N type connector
Forced air cooling
Two-channel mass flow meter Ar 0~200sccm; O2 0~200sccm, customizable
Other parameters refer to previous products
Digital vacuum gauge (resistance gauge)
Two-stage rotary vane vacuum pump
50 Hz: 1440; 60 Hz: 1720
50 Hz: 240L/Min; 60 Hz: 288L/Min
Gas inlet: KF16; exhaust port KF16.
KF16 vacuum bellows
KF16 ball valve
80kg (including packaging)
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On September 20-22, 2019, Zhengzhou CY Scientific Instrument Co., Ltd. (referred to as CYKY) participated in the 2019 Chinese Physics Society Fall Conference (CPS Fall Meeting) hosted by Zhengzhou University.
n the morning of April 27, 2019, our company invited Mr. Dou, a well-known marketing and management consultant, career planner and training instructor, to conduct professional management training for all employees of the company according to the actual situation of the company.