Lab plasma surface treatment instrument

Lab plasma surface treatment instrument combines atmospheric plasma beam together with two dimensions automatic working stage, which allows plasma beam to scan sample surface according to program setting and surface coating or treatment consistent and uniform.

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Lab plasma surface treatment instrument consists of RF generator, flexible gas delivery pipe, plasma beam head, the X-Y working stage with vacuum chuck sample holder and programmable control box.The plasma beam can activate and clean material surface rapidly at low temperature without vacuum, such as single crystal wafer, optical component, plastics etc, and also it can make plasma enhanced CVD film on the substrate via mixture chemical gas under atmospheric pressure.

Lab plasma surface treatment instrument specification:

Input Power for Plasma	208 V - 240VAC, 50/60 Hz, < 1000W
RF Generator	Output Frequency: 20-23kHz,25KV Plasma Beam Head: Two plasma beam heads are included: Round head: 10-12mm; Rectangular head: 15-18mm
Input Gas Pressure and Working Gases	40 PSI min.(0.055 Mpa) Air, N2, Ar, He or any mixed gas (no flammable and explosive gases)
Plasma Working Pressure	7- 10 PSI
Working Environmental	Temperature: < 42°C Humidity: ≤ 40℃RH No flammable gas
Sample Stage & Controller	X-Y two dimension are driven by step motors and controlled by SBC control box. Z axis is adjustable by manual Control box has LCD display and scanning program can be set by function key Max. scanning area: 8"×9" One 4" diameter vacuum chunk is installed on X-Y sample holder, which can soak thin wafer up to 6" diameter on the sample holder firmly One vacuum pump is included to connect the vacuum chunk The whole system is placed on a heavy duty mobile cart (600×600×800Lmm)
Dimensions & Net Weight	Coating Stage Dimensions: 560mm L×483mm W×609mm H (Supporting Frame Dimensions: 420mm L×305mm W×457mm H) Plasma Generator Dimensions: 406mm L×508mm W×230mm H Movement Control Box Dimensions: 330mm L×305mm W×152mm H Net weight: 55 kg
Warranty & Certificate	One year limited warranty with lifetime support CE certified