Plasma Cleaning Machine

Plasma cleaning machine divided into two types, atmospheric and vacuum; it is widely used in semi-conductor, PCB, medical diagnosis, elastomer industry, optical industry,etc.

RF generator has 40KHz, 13.56Mhz, and 2.45GHz. According to the usage, can choose the suitable RF Power. Our standard chamber capacity has 2L, 5L,10L which used in laboratory. Basing on different industry, we can do customized chamber dimension with requested RF power.

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Model No.	CY-P2L
Product Name	2L Plasma Cleaner
Display	LCD touch controller
Working voltage	AC 220V, 50Hz
RF Frequency	40KHz (13.56MHz for optional)
Coupled mode	condenser coupling, without pollute sample
RF power	200 w
RF offset	< 0.2KHz
Characteristic impedance	50Ω, automatic matching
Vacuum degree	10-100Pa, equipped with a mechanical pump If request high vacuum, please select our turbo pump system (Optional)
Gas speed	Two way Float Flow Gas Control10-100ml/min, adjustable
Control	PLC Touch Panel Program controlAuto/Manual two mode for optional
Inner chamber size	Stainless Steel Chamber with Φ 100270mm If Chamber is not enough for using, we have Φ 150270mm (capacity: 5L)200* 200*260mm (capacity: 10L)for optional
Pressure Gauge	A simple digital pressure gauge is equipped for reading If request high precision vacuum reading, please select digital vacuum gauge: (Optional)
Cooling way	Forced cooling
Outer dimension	440390200mm
Gross weight	35 kg
Time of delivery	10 working days after receive the payment