1200℃ single heating zone high vacuum CVD system is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.
1200℃ single heating zone high vacuum CVD system consists of a single heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
This system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
Vacuum tube furnace
High purity quartz
50mm (Optional 60mm, 80mm, 100mm)
Furnace chamber length
Heating zone length
Constant temperature zone
Temperature control accuracy
Temperature control mode
30 or 50 segment program temperature control
304 stainless steel vacuum flange
1/4" cutting sleeve joint, KF16/25/40 joint
Gas supply system
Gas float flowmeter
A channel: 0～100ml/min H2 gas
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 16～160 ml/min N2 gas
C channel: 25～250 ml/min Ar gas
Pipe pressure resistance
Working pressure difference
304 stainless steel
304 stainless steel needle valve
1/4" cutting sleeve joint for gas inlet and outlet
Rotary vane pump
Molecular pump: 600L/S
Comprehensive gas pumping performance: the vacuum can reach 6.0E-5Pa in 30 minutes.
Rotary vane pump: 1.1L/S
Compound vacuum gauge: Pirani gauge + ionization gauge
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