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1200℃ single heating zone high vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1200-50IT-3F-HV

1200℃ single heating zone high vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1200-50IT-3F-HV

    1200℃ single heating zone high vacuum CVD system is equipped with a three-channel float flowmeter, which can mix 1~3 channels of gas to accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

1200℃ single heating zone high vacuum CVD system consists of a single heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

This system is also equipped with a precision molecular pump set, which can achieve a vacuum of 1.0E-3pa level, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ single heating zone high vacuum CVD system technical parameters:

Vacuum tube   furnace



Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber   length


Heating zone   length


Constant   temperature zone


Operating   temperature


Temperature   control accuracy


Temperature   control mode

30 or 50 segment program temperature control

Display mode


Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" cutting sleeve joint, KF16/25/40 joint



Power supply

AC:220V   50/60Hz

Gas supply system



Gas channel


Measuring   unit

Gas float flowmeter

Measuring range

A channel: 0100ml/min  H2 gas

Remarks: If   you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 16160 ml/min  N2 gas

C channel: 25250 ml/min  Ar gas

Measurement   accuracy


Pipe   pressure resistance


Working   pressure difference


Connecting   pipe

304 stainless steel

Control   valve

304 stainless steel needle valve

Interface   specification

1/4" cutting sleeve joint for gas inlet and outlet

Power supply

AC:220V   50/60Hz

Exhaust   system



Molecular   pump


Backing pump

Rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive gas pumping performance: the vacuum can reach 6.0E-5Pa in 30 minutes.

Rotary vane pump: 1.1L/S

Pumping   interface


Exhaust   interface


Vacuum   measurement

Compound vacuum gauge: Pirani gauge + ionization gauge

Ultimate   vacuum


Power supply

AC:220V   50/60Hz

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