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1200℃ three heating zone high vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1200-50IIIT-3F-HV

1200℃ three heating zone high vacuum CVD system with 3-channel float flowmeter to supply gas CY-O1200-50IIIT-3F-HV

    1200℃ three heating zone high vacuum CVD system is equipped with a three-channel float flowmeter, which can accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

1200℃ three heating zone high vacuum CVD system consists of a three-heating zone tube furnace, a three-channel float flow meter and a high vacuum molecular pump set. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

1200℃ three heating zone high vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ three heating zone high vacuum CVD system technical parameters:

Vacuum tube   furnace



Tube material

High purity quartz

Tube diameter

50mm(optional: 60mm, 80mm, 100mm)

Tube length


Furnace chamber length


Heating zone   length


Operating   temperature


Temperature   control accuracy


Temperature   control mode

30 or 50 segment program temperature control

Display mode


Sealing   method

304 stainless steel vacuum flange

Flange   interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V   50/60Hz

Gas supply   system



Gas channel


Measuring unit

Gas float flowmeter

Measuring   range

A channel: 0100ml H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 16160ml N2 gas

C channel: 25250ml Ar gas

measurement   accuracy


Pipe pressure resistance


Working   pressure difference


Connecting   pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface   specification

1/4" ferrule connector for gas inlet and outlet

Exhaust   system



Molecular pump


Backing pump

Rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive   gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa

Rotary vane pump: 1.1L/S

Pumping   interface


Exhaust   interface


Vacuum   measurement

Compound vacuum gauge: Resistance gauge + ionization gauge

Ultimate   vacuum


Power supply

AC:220V   50/60Hz

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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