1200℃ three heating zone high vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
1200℃ three heating zone high vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a high vacuum molecular pump set. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections temperature rise and fall program, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
Vacuum tube furnace
High purity quartz
50mm (Optional 60mm, 80mm, 100mm)
Furnace chamber length
Heating zone length
Temperature control accuracy
Temperature control mode
30 or 50 segment program temperature control
304 stainless steel vacuum flange
1/4" cutting sleeve joint, KF16/25/40 joint
Gas supply system
Gas mass flow meter
A channel: 0～100 SCCM H2 gas
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 0～300SCCM N2 gas
C channel: 0～500SCCM Ar gas
Pipe pressure resistance
Working pressure difference
304 stainless steel
304 stainless steel needle valve
1/4" cutting sleeve joint for gas inlet and outlet
Rotary vane pump
Molecular pump: 600L/S
Comprehensive gas pumping performance: 30 minutes vacuum can reach: 6.0E-5Pa
Rotary vane pump: 1.1L/S
Compound vacuum gauge: Pirani gauge + ionization gauge
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