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1200℃ three heating zone high vacuum CVD system with 3-channel mass flow meter CY-O1200-50IIIT-3Z-HV

1200℃ three heating zone high vacuum CVD system with 3-channel mass flow meter CY-O1200-50IIIT-3Z-HV

    1200℃ three heating zone high vacuum CVD system is equipped with three-channel mass flowmeter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ three heating zone high vacuum CVD system consists of a three-heating zone tube furnace, a three-channel mass flow meter and a high vacuum molecular pump set. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections temperature rise and fall program, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The system is also equipped with a precision molecular pump set, which can achieve a vacuum degree of 1.0E-3pa, which can provide users with a purer and more stringent experimental environment than ordinary mechanical pumps.

1200℃ three heating zone high vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ three heating zone high vacuum CVD system technical parameters:

Vacuum tube furnace



Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber length


Heating zone length


Operating temperature


Temperature control   accuracy


Temperature control   mode

30 or 50 segment program temperature control

Display mode


Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V 50/60Hz

Gas supply system



Gas channel


Measuring unit

Gas mass flow meter

Measuring range

A channel: 0100 SCCM H2 gas

Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement accuracy


Pipe pressure   resistance


Working pressure   difference


Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system



Molecular pump


Backing pump

Rotary vane pump

Pumping rate

Molecular pump: 600L/S

Comprehensive gas pumping performance: 30 minutes vacuum can reach: 1.0E-3Pa

Rotary vane pump: 1.1L/S

Pumping interface


Exhaust interface


Vacuum measurement

Compound vacuum gauge: Resistance gauge + ionization gauge

Ultimate vacuum


Power supply

AC:220V 50/60Hz

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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