Home > Products > CVD System
1200℃ two heating zone low vacuum CVD system with 3-channel float flow meter to supply gas CY-O1200-50IIT-3F-LV

1200℃ two heating zone low vacuum CVD system with 3-channel float flow meter to supply gas CY-O1200-50IIT-3F-LV

    1200℃ two heating zone low vacuum CVD system is equipped with a three-channel float flowmeter, which can accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

1200℃ two heating zone low vacuum CVD system consists of a two-heating zone tube furnace, a three-channel float flow meter and a double stage rotary vane vacuum pump. The two heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form two temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall program, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

1200℃ two heating zone low vacuum CVD system applications:

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ two heating zone low vacuum CVD system technical parameters:

Vacuum tube furnace



Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm, 80mm, 100mm)

Tube length


Furnace chamber length


Heating zone length


Operating temperature


Temperature control   accuracy


Temperature control   mode

30 or 50 segment program temperature control

Display mode


Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" ferrule connector, KF16/25/40 joint



Power supply

AC:220V 50/60Hz

Gas supply system



Gas channel


Measuring unit

Gas float flow meter

Measuring range

A channel: 0100ml H2 gas

Remarks: If you need   other ranges or gas types, you need to specify when ordering. According to   the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 16160ml N2 gas

C channel: 25250ml Ar gas

measurement accuracy


Pipe pressure   resistance


Working pressure   difference


Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" ferrule connector for gas inlet and outlet

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate


Exhaust interface


Vacuum measurement

Resistance gauge

Ultimate vacuum


Power supply

AC:220V 50/60Hz

Pumping interface


Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

Contact Us
  • E-mail: cysi@cysi.wang
  • Tel: +86 371 5519 9322
  • Fax: +86 371 8603 6875
  • Add: No. 820, 8th Floor, 1st Unit, 9th Block, Cuizhu Street, High-Tech Zone, Zhengzhou, Henan, China
  • Pakistan Distributor:
    NEO LFN CorpMicro Mega Solutions
    Address: Flat # 04,2nd Floor Sarwar Plaza Shamsabad Murree Road Rawalpindi.
    Tel:  +92 312 9892 35 33
Follow Us

Copyright © Zhengzhou CY Scientific Instrument Co., Ltd. All Rights Reserved   

| Sitemap |       Technical Support: