1200℃ single-heating zone low vacuum CVD system consists of a single heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control.
1200℃ single-heating zone low vacuum CVD system consists of a single heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.
The system is equipped with a three-channel mass flow meter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.
It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.
Vacuum tube furnace
High purity quartz
50mm (Optional 60mm, 80mm, 100mm)
Furnace chamber length
Heating zone length
Constant temperature zone
Temperature control accuracy
Temperature control mode
30 or 50 segment program temperature control
304 stainless steel vacuum flange
1/4" ferrule connector, KF16/25/40 joint
Gas supply system
Gas mass flowmeter
A channel: 0～100SCCM H2 gas
Remarks: If you need other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.
B channel: 0～300SCCM N2 gas
C channel: 0～500SCCM Ar gas
Pipe pressure resistance
Working pressure difference
304 stainless steel
304 stainless steel needle valve
1/4" ferrule connector for gas inlet and outlet
Rotary vane pump
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