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1200℃ single heating zone low vacuum CVD system with 3-channel mass flow meter CY-O1200-50IT-3Z-LV

1200℃ single heating zone low vacuum CVD system with 3-channel mass flow meter CY-O1200-50IT-3Z-LV

    1200℃ single heating zone low vacuum CVD system equipped with a three-channel mass flow meter, which has high precision and high reliability. It can accurately mix 1~3 channels of gas. The operation panel adopts digital display, which is intuitive and efficient. If you have special needs, you can contact the technician to customize any number of gas channels.

1200℃ single-heating zone low vacuum CVD system consists of a single heating zone tube furnace, a three-channel mass flow meter and a double stage rotary vane vacuum pump. The tube furnace is controlled by the precision temperature control instrument for PID temperature control. It can edit the 30-segment raising and falling temperature program and has the function of overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by high-definition true color touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

1200℃ single-heating zone low vacuum CVD system technical parameters:

Vacuum tube furnace

Model

CY-O1200-50IT

Tube material

High purity quartz

Tube diameter

50mm (Optional 60mm,   80mm, 100mm)

Tube length

1000mm

Furnace chamber length

440mm

Heating zone length

400mm

Constant temperature zone

200mm

Operating temperature

0~1100℃

Temperature control accuracy

±1℃

Temperature control mode

30 or 50 segment program temperature control

Display mode

LCD

Sealing method

304 stainless steel vacuum flange

Flange interface

1/4" cutting sleeve joint, KF16/25/40 joint

Vacuum

4.4E-3Pa

Power supply

AC:220V 50/60Hz

Gas supply system

Model

CY-3Z

Gas channel

3-channel

Measuring unit

Gas mass flowmeter

Measuring range

A channel: 0100SCCM H2 gas

Remarks: If you need   other ranges or gas types, you need to specify when ordering. According to the customer's specific requirements, the flow meter of the corresponding gas type and range can be selected.

B channel: 0300SCCM N2 gas

C channel: 0500SCCM Ar gas

measurement accuracy

±1.0%F.S

Pipe pressure   resistance

3MPa

Working pressure   difference

50300KPa

Connecting pipe

304 stainless steel

Gas channel

304 stainless steel needle valve

Interface specification

1/4" cutting sleeve joint for gas inlet and outlet

Exhaust system

Mechanical pump

Rotary vane pump

Pumping rate

1.1L/S   

Exhaust interface

KF16

Vacuum measurement

Pirani gauge

Ultimate vacuum

1.0E-1Pa

Power supply

AC:220V 50/60Hz

Pumping interface

KF16

Disclaimer: The product introduction content (including product images, product descriptions, technical parameters, etc.) of this site is for reference only. As the update may not be timely, there will be some differences between the content and the actual situation. Please contact our sales staff to confirm. The information provided on this site does not constitute any offer or promise, and the company will improve and modify any information on the website from time to time without prior notice.

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