The 5kg powder magnetron sputtering coating instrument is a large-capacity vacuum PVD coating equipment specially designed for powder particles. It is developed for a single loading capacity of 5kg powder materials.

The 5kg powder magnetron sputtering coating instrument is a large-capacity vacuum PVD coating equipment specially designed for powder particles. It is developed for a single loading capacity of 5kg powder materials. Based on the physical vapor deposition principle of magnetron sputtering, it is equipped with a rotating chamber and powder tumbling vibration mechanism to keep powder particles continuously rolling without dead angles. Dense nano-films of metals, alloys, ceramics and oxides can be uniformly deposited on the surface of each powder particle.
The whole process is carried out in a fully sealed high-vacuum environment, featuring dense films, controllable thickness, uniform coating and no agglomeration. It is suitable for small-batch pilot tests and modification preparation of new materials. Developed and manufactured by Zhengzhou Chengyue Scientific Instruments, it meets the demands of laboratory research and small-batch trial production simultaneously.
1. Surface coating modification of powder particles: coating conductive layers, anti-oxidation layers, anti-corrosion layers, insulating layers, catalytic layers and antibacterial layers on micro/nano powders;
Solve common defects of powders including easy oxidation, agglomeration, poor electrical conductivity, weak dispersibility and weak interfacial compatibility;
Fabricate single-layer films, multi-layer composite films and alloy co-sputtered films;
Conduct conductive gold/silver coating pretreatment for powder samples for SEM testing;
Process exploration of new material formulas and small-batch pilot coating production.
New Energy Materials: Coating metal/carbon thin films on lithium battery cathode/anode powder, silicon-carbon anode and graphite powder; modification of solid electrolyte powder and preparation of supercapacitor electrode powder;
Catalytic Materials: Coating precious metals (Pt, Ag, Au) on catalyst powder to improve catalytic activity and stability;
Powder Metallurgy & Metal Powders: Preparing anti-oxidation coatings on iron powder, aluminum powder and alloy powder to enhance powder storage performance and sintering property;
Biomedicine: Depositing silver antibacterial coatings on medicinal powder and hydroxyapatite powder; surface modification of bioceramic powder;
Optoelectronics & Sensors: Coating optical thin films on phosphor powder, luminescent microspheres; preparation of sensitive layers for gas-sensing powder;
Composite Fillers: Metallization coating of inorganic fillers such as silica, alumina and silicon carbide to strengthen interfacial bonding force with resin and rubber;
Scientific Research & Physical-Chemical Testing: Conduct conductive coating for various powders for Scanning Electron Microscope (SEM) testing.
Product Name | 5kg Powder Magnetron Sputtering Coating Instrument | |
Product Model | CY-MSH325-5KG | |
Powder Loading Chamber System | Chamber Size | Φ325mm×H420mm, integrally formed 304 stainless steel |
Chamber Rotation Speed | 0~20rpm, stepless variable frequency adjustable | |
Temperature Control Accuracy | ±1℃ | |
Internal Structure | Built-in stirring and dispersing strips to avoid powder accumulation and uneven coating | |
Observation Component | Quartz visual window | |
Multi-Arc Plasma Target System | Standard Target Quantity | Single target |
Target Specification | Cylindrical target: nickel target, φ100×40mm | |
Compatible Target Materials | Various metals, alloys, ceramics and oxide targets | |
Standard Power Supply | 1 set of multi-arc power supply | |
Optional Power Supply | DC power supply, sputtering power supply | |
Cooling Mode | Air cooling | |
Vacuum Pump System | Ultimate Vacuum | ≤5×10⁻⁴ Pa |
Multi-Arc Working Pressure | DC: 0.1~0.5Pa | |
Pump Configuration | 650L/s turbo molecular pump + oil-free fore vacuum pump | |
Static Leak Rate of Whole Machine | <1×10⁻⁸ Pa·m³/s | |
Gas Supply System | Standard Working Gas | High-purity argon |
Optional Reaction Gas | Oxygen, nitrogen | |
Gas Control Unit | High-precision mass flow controller, range: 0~500sccm | |
Control & Measurement System | Operation Mode | PLC + 10-inch touch screen full automatic program control |
Process Storage | Stores up to 30 sets of coating process formulas | |
Optional Accessories | Quartz crystal film thickness monitor, film thickness resolution: 0.1Å | |
Safety Protection | Complete interlock alarm protection for water shortage, overvoltage, overcurrent and vacuum failure | |
Overall Machine Parameters | Input Power Supply | AC380V/50Hz |
Rated Power of Whole Machine | 5kW | |
Overall Dimension | 1100mm×920mm×1300mm | |
Net Weight | 580Kg | |
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